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General procedure for vacuum unit design calculation:
A. Calculation of total venting volume in the vacuum chamber;
B. determining the effective pumping speed of the vacuum chamber;
C. coarsely equipped main pump and coarse pre-stage vacuum pump;
D. Select vacuum components such as valves, traps, and dust collectors according to requirements;
E. Draw a vacuum system assembly sketch to determine the dimensions of each part;
F. Accurate (review) calculate the parameters of each vacuum pump. If the rough selected vacuum pump does not meet the requirements, it is necessary to re-select the pump and the pump until the parameters are met.
G. Drawing a vacuum system assembly drawing;
H. Draw a part drawing and draw a construction drawing.
The above eight design calculation steps are indispensable for non-standard designs. With the continuous development of vacuum equipment, with the emergence of various new types of vacuum units, the design process of the vacuum system will be simplified. Now that there is a fixed vacuum unit, if the vacuum unit can be directly selected to obtain the required vacuum system, Can eliminate the troublesome vacuum system design.
The choice of the foreline pump and the pre-pumping pump in the vacuum unit is very important. The wrong choice will affect the entire work process and even cause great economic losses.
With preamp pump:
The foreline pump directly affects the performance of the main pump, affecting the pumping time and economic benefits of the vacuum system. When the gas is in a steady flow state in the vacuum system, the airflow in any section of the entire pipeline is most equal. Therefore, the pumps pumped in series on the pipeline are equal in gas pumped per unit time. However, the air pressure in each section of the piping system is not equal, and the pumping speed of each section is different. Therefore, the requirements for the pre-stage pump are
1 to ensure that the flow of gas discharged from the main pump is always discharged in time;
2 the pressure generated at the outlet of the main pump is lower than the maximum discharge pressure of the main pump;
3 If the pre-stage is also used as a pre-vacuum pump, the pre-extraction time and pre-vacuum degree requirements are also met.
Some main pumps, such as titanium pumps and cryopumps, only need to pre-pump the pump to the pre-vacuum and then work on its own, without the need for a foreline pump. The pre-pump pumping speed of such a system is the pumping speed at which the vacuum chamber is pumped to the required pre-vacuum degree (usually 10-15 min).
Other main pumps, such as diffusion pumps and booster pumps, require both a foreline pump and a pre-pump. At this time, the two pumping speeds can be compared. If the pumping speed of the pre-pumping pump is not greater than the pumping speed of the pre-stage pump, the fore pump can also serve as a pre-pumping pump. Otherwise, a pre-vacuum pump needs to be added. The pumping speed of this pre-pumped pump is the difference between the above two pumping speeds.
Zhejiang Wohua Vacuum Equipment Co., Ltd. (formerly Shuguang Vacuum) is a leading supplier of vacuum equipment and vacuum system solutions. We continue to innovate and open cooperation around the needs of our customers. Strict requirements in every link: "To create safe, efficient and stable on-site quality management." Enterprises always insist that product quality is the life of the enterprise, customer service is the soul of the enterprise, corporate culture, and enterprise management is the source of development. Products include: Roots vacuum pump series (Roots vacuum pump unit), slide valve vacuum pump series, rotary vane vacuum pump series, water ring vacuum pump series (water ring vacuum unit), dry screw vacuum pump series, each vacuum system customization program.